Tyndall

Technologies

EUROPRACTICE partner Tyndall offers two variants of piezoMEMS stack with AlScN (Scandium 6.5 atomic percentage) as the piezoelectric layer, that can be used for the development of piezo based devices for a variety of applications.

Single electrode layer stack

The single electrode stack has a silicon substrate with an optional TOX (Thermal Oxide) layer, a Piezoelectric layer of AlScN and Molybdenum as the top electrode. This stack could further be used by any researcher / industry with in-house microfabrication capabilities to carry out post processing at their facility.

Technology characteristics8 inch wafer (200 mm)
Substrate:
• 725um thickness Silicon, 200mm diameter
• Type/Dopant: P/Boron
• Orientation: <100>
• Resistivity: 1 - 50 ohm-cm
• Thickness: 725±25um
Top Electrode: Molybdenum – 250 ±10nm thickness
Optional TOX (Thermal Oxide): 1µm ± 10%Thickness
Piezoelectric layer: AlScN with Sc-6.5% (at): 1± 10% µm thickness
Special featuresPiezoelectric Layer of AlScN with D33 around 6 pC/N (As measured by Piezometer PM300)
Application areaPiezoMEMS sensors and actuators
Energy Harvesting
Ultrasonic transducers
Medical applications
Optics
RF applications
Biosensors
Quantum physics applications
Space applications etc.
Pictorial representation of the single electrode layer stack
SEM image of the single electrode layer stack

Dual electrode layer stack

The dual electrode layer stack has a silicon substrate with TOX (Thermal oxide) layer, a bottom Molybdenum metal electrode, the Piezoelectric layer of AlScN and a Molybdenum top electrode. This stack could further be used by any researcher / industry with in-house microfabrication capabilities to carry out post processing at their facility.

Technology characteristics8 inch wafer (200 mm)
Substrate:
• 725um thickness Silicon, 200mm diameter
• Type/Dopant: P/Boron
• Orientation: <100>
• Resistivity: 1 - 50 ohm-cm
• Thickness: 725± 25um
TOX (Thermal Oxide): 1µm ± 10%Thickness
Top and bottom electrode: Molybdenum – 250 ± 10 nm thickness
Piezoelectric layer: AlScN with Sc-6.5% (at): 1 ± 10% µm thickness
Special featuresPiezoelectric Layer of AlScN with D33 around 6pC/N (As measured by Piezometer PM300)
Application areaPiezoMEMS sensors and actuators
Energy Harvesting
Ultrasonic transducers
Medical applications
Optics
RF applications
Biosensors
Quantum physics applications
Space applications etc.
Pictorial representation of the dual electrode layer stack
SEM image of the dual electrode layer stack

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