CMC Microsystems announced that the organization will facilitate silicon photonics wafer runs through Advanced Micro Foundry (AMF) of Singapore with local European support from the EUROPRACTICE partner CMP. In 2020, the Si-Photonics fabrication process AMF has become available for EUROPRACTICE customers.
Si-Photonics fabrication process AMF
Silicon-on-insulator, 220-nm top Si film, 2000-nm buried oxide (BOX)
High resistivity handle wafer (>750 ohm-cm)
193-nm deep UV lithography for waveguides, enabling features down to approximately 140 nm
Two partial etches and one full etch of the top silicon
Germanium deposition and implanting for photodetectors
Two metal levels, no planarization
Front side oxide etch to selectively expose waveguides, e.g. for sensing applications
Deep trench with etched facets for edge coupling
Supports design and fabrication of a range of components and systems consisting of:
waveguides (strip or ridge)
gratings for fiber coupling
deep trench and nano-tapers for edge coupling
multiplexers (diffraction or arrayed waveguide) and filters (resonators, Bragg gratings)
ring and disk resonators.
Frontend Backend tools: Mentor Graphics Pyxis and Luceda IPKISS-Tanner L-Edit
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