The 2D Experimental Pilot Line (2D-EPL) has launched its first multi-project wafer (MPW) run where universities, research institutes and companies can include their designs as dies on joint wafers. The first run is mainly intended for graphene sensors, and will be offered by AMO GmbH.
Located in Aachen, Germany, close to the borders of Belgium and the Netherlands, the research foundry AMO GmbH, a non-profit nanotechnology SME, follows the mission to efficiently close the gap between university research and industrial application. It demonstrates innovative technologies and introduces new materials, including their implementation in novel device architectures, prototyping and small volume fabrication. A state-of-the-art 400 m² cleanroom is operated and a range of services from consulting to prototype development is offered. In recent years, AMO has become a global player in 2D materials research for electronics and photonics.
The offered baseline process for the first MPW run is a GFET including a top/bottom contact with an optional local or global back gate, an optional encapsulation and an optional graphene-area opening. The design of the device can be adjusted within the specifications listed below.
Technology Characteristics | |
|---|---|
Substrate | Material: Silicon, Glass Basic die size: 1 x 1 cm² (a different size can be consulted upon individual request) |
Resolution | General design rule: 5µm for in-layer critical dimension and over-layer alignment |
Baseline Process | Top/Bottom metal contact Wafer scale graphene transfer Basic module provided in PDK: Hall cross, TLM devices, 4-point measurement bar Optional: encapsulation, and via opening on top of metal pads Optional: graphene sensing area opening Optional: metal local or global back gate |
Characterization | Optional: Raman characterization Optional: Electrical measurement for as-fabricated devices |
Application | Bio/ Gas/ Chemical sensors, Hall Sensors, Photodetectors |
More details | Read more
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