The 2D Experimental Pilot Line (2D-EPL) has launched its second multi-project wafer (MPW) run where universities, research institutes and companies can include their designs as dies on joint wafers. The second run is mainly intended for graphene sensors, and will be offered by VTT.
VTT Technical Research Centre of Finland Ltd is a state-owned non-profit research and technology organisation (RTO) with the aim of strengthening Finnish and European industrial competitiveness in multiple fields ranging from sustainable food and energy production to quantum computing. As an RTO VTT acts between universities and industry, bringing basic research towards industrial adaptation and helping the industry in their R&D needs. Graphene industrialisation at VTT is based on 2 600 m2 cleanroom in Micronova, Espoo, with a focus on wafer-scale CVD graphene process optimisation for electronics, photonics and sensors, including the integration on silicon CMOS for multiplexed sensor arrays. In addition to the MPW runs, VTT offers contract research, prototyping and small-scale manufacturing.
The offered baseline process for the second MPW run is a GFET including a top/bottom contact with an optional local or global back gate, an optional encapsulation and an optional graphene-area opening. The design of the device can be adjusted within the specifications listed below.
Technology Characteristics | |
|---|---|
Substrate | Material: Silicon/SiO2 Basic die size: 1 x 1 cm² (a different size can be consulted upon individual request) |
Resolution | General design rule: 5µm for in-layer critical dimension and over-layer alignment |
Baseline Process | Gate module Contact module Graphene module Encapsulation module |
Characterization | Raman characterisation Electrical measurements |
Application | Bio/ Gas/ Chemical sensors, Hall Sensors, Photodetectors |
