EUROPRACTICE partner Tyndall offers two variants of piezoMEMS stack with AlScN (Scandium 6.5 atomic percentage) as the piezoelectric layer, that can be used for the development of piezo based devices for a variety of applications.
The single electrode stack has a silicon substrate with an optional TOX (Thermal Oxide) layer, a Piezoelectric layer of AlScN and Molybdenum as the top electrode. This stack could further be used by any researcher / industry with in-house microfabrication capabilities to carry out post processing at their facility.
Single electrode layer stack | |
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Technology characteristics | 8 inch wafer (200 mm) Substrate: • 725um thickness Silicon, 200mm diameter • Type/Dopant: P/Boron • Orientation: <100> • Resistivity: 1 – 50 ohm-cm • Thickness: 725±25um Top Electrode: Molybdenum – 250 ±10nm thickness Optional TOX (Thermal Oxide): 1µm ± 10%Thickness Piezoelectric layer: AlScN with Sc-6.5% (at): 1± 10% µm thickness |
Special features
| Piezoelectric Layer of AlScN with D33 around 6 pC/N (As measured by Piezometer PM300)
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Application area
| PiezoMEMS sensors and actuators Energy Harvesting Ultrasonic transducers Medical applications Optics RF applications Biosensors Quantum physics applications Space applications etc. |
The dual electrode layer stack has a silicon substrate with TOX (Thermal oxide) layer, a bottom Molybdenum metal electrode, the Piezoelectric layer of AlScN and a Molybdenum top electrode. This stack could further be used by any researcher / industry with in-house microfabrication capabilities to carry out post processing at their facility.
Dual electrode layer stack | |
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Technology characteristics | 8 inch wafer (200 mm) Substrate: • 725um thickness Silicon, 200mm diameter • Type/Dopant: P/Boron • Orientation: <100> • Resistivity: 1 – 50 ohm-cm • Thickness: 725± 25um TOX (Thermal Oxide): 1µm ± 10%Thickness Top and bottom electrode: Molybdenum – 250 ± 10 nm thickness Piezoelectric layer: AlScN with Sc-6.5% (at): 1 ± 10% µm thickness |
Special features
| Piezoelectric Layer of AlScN with D33 around 6pC/N (As measured by Piezometer PM300)
|
Application area
| PiezoMEMS sensors and actuators Energy Harvesting Ultrasonic transducers Medical applications Optics RF applications Biosensors Quantum physics applications Space applications etc. |
